![]() ![]() When you install an older or newer version, it might not used the locked up driver file and install its own instead (depending on the driver version). The reason other solutions here work is because sometimes the filename of the driver will increment (it's at PROCMON24.SYS right now). If it deletes it successfully, then it may have been corrupt and the next time you run Process Monitor it'll work by re-installing it. If it denies access because it's open in another process, that's definitely the issue. ![]() If you want to find out if this is the case, delete that driver file (Process Monitor automatically re-installs it when it runs). The solution is to open task manager and kill Process Monitor to solve the issue. ![]() It probably failed to cleanly exit last time and just got stuck. If you ran it successfully before and are having issues now, then most common issue is the procmonXX.sys driver inside of C:\Windows\System32\drivers is locked up by another process, specifically a zombie process of Process Monitor. ![]()
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